Title:
METHOD FOR MANUFACTURING NONRADIATIVE DIELECTRIC WAVEGUIDE AND NONRADIATIVE DIELECTRIC WAVEGUIDE
Document Type and Number:
WIPO Patent Application WO/2004/017455
Kind Code:
A1
Abstract:
A conductive film is formed on a substrate wherein an MEMS circuit has been manufactured; a dielectric A film having a low dielectric constant and a dielectric B film having a high dielectric constant are formed on the conductive film; and a conductive film is formed on the dielectric films. A millimeter wave is guided by the dielectric B film functioning as a dielectric waveguide and propagated as being reflected by the conductor.
Inventors:
YUASA MITSUHIRO (JP)
Application Number:
PCT/JP2003/010316
Publication Date:
February 26, 2004
Filing Date:
August 13, 2003
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
YUASA MITSUHIRO (JP)
YUASA MITSUHIRO (JP)
International Classes:
H01P3/16; H01P11/00; (IPC1-7): H01P3/16; H01P11/00
Foreign References:
| JPH1127010A | 1999-01-29 | |||
| JPS57166701A | 1982-10-14 | |||
| JPH10303609A | 1998-11-13 | |||
| JPH11144596A | 1999-05-28 | |||
| JPS58215804A | 1983-12-15 | |||
| GB1301553A | 1972-12-29 |
Attorney, Agent or Firm:
Aoki, Atsushi (ISHIDA & ASSOCIATES Toranomon 37 Mori
Bldg., 5-1, Toranomon 3-chom, Minato-ku Tokyo, JP)
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