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Title:
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/094547
Kind Code:
A1
Abstract:
A method for manufacturing a photoelectric conversion element, said method comprising: a step in which a first electrode is positioned on a substrate; a step in which a first thin film is positioned above the first electrode, said first thin film being formed from a metal oxide that includes zinc (Zn) and oxygen (O) and further includes silicon (Si) and/or tin (Sn); a step in which pressure is applied to the substrate using a gas, said substrate having the first electrode and the first thin film; a step in which a photoelectric conversion layer is positioned above the first thin film, said photoelectric conversion layer being a layer than converts an applied voltage into light or a layer that converts incident light into electricity; and a step in which a second electrode is positioned above the photoelectric conversion layer.

Inventors:
HOSONO HIDEO (JP)
KUMOMI HIDEYA (JP)
NAKAMURA NOBUHIRO (JP)
WATANABE SATORU (JP)
WATANABE TOSHINARI (JP)
MIYAKAWA NAOMICHI (JP)
Application Number:
PCT/JP2016/084475
Publication Date:
June 08, 2017
Filing Date:
November 21, 2016
Export Citation:
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Assignee:
TOKYO INST TECH (JP)
ASAHI GLASS CO LTD (JP)
International Classes:
H05B33/10; C23C14/08; H01L51/48; H01L51/50; H05B33/26
Domestic Patent References:
WO2004013372A12004-02-12
WO2012153507A12012-11-15
WO2012121332A12012-09-13
Foreign References:
JP2000306681A2000-11-02
JP2015038027A2015-02-26
JP2009302071A2009-12-24
JP2008280216A2008-11-20
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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