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Title:
METHOD FOR MANUFACTURING A PHOTOVOLTAIC CELL STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2009/141459
Kind Code:
A3
Abstract:
In the frame of manufacturing a photovoltaic cell a layer (3) of silicon compound is deposited on a structure (1). The yet uncovered surface (3a) is treated in a predetermined oxygen (O2) containing atmosphere which additionally contains a dopant (D). Thereby, the silicon compound layer is oxidized and doped in a thin surface area (5).

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Inventors:
MEIER JOHANNES (CH)
BRONNER MARKUS (CH)
KUPICH MARKUS (CH)
ROSCHEK TOBIAS (CH)
GOLDBACH HANNO (CH)
Application Number:
PCT/EP2009/061576
Publication Date:
October 07, 2010
Filing Date:
September 07, 2009
Export Citation:
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Assignee:
OERLIKON SOLAR AG (CH)
MEIER JOHANNES (CH)
BRONNER MARKUS (CH)
KUPICH MARKUS (CH)
ROSCHEK TOBIAS (CH)
GOLDBACH HANNO (CH)
International Classes:
H01L31/076; H01L31/077; H01L31/18; H01L31/20
Foreign References:
US6379994B12002-04-30
US20060043517A12006-03-02
US7238545B22007-07-03
US5792280A1998-08-11
Attorney, Agent or Firm:
TROESCH SCHEIDEGGER WERNER AG (Schwäntenmos 14, Zumikon, CH)
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