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Title:
METHOD FOR MANUFACTURING PLASMA DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2007/055304
Kind Code:
A1
Abstract:
There are equipped with a vapor deposition chamber (21) for forming a protective film on a surface of a front substrate (3) provided with a display electrode and a dielectric layer, on which surface the dielectric layer is formed, a transport unit (25) for carrying the front substrate (3) within the vapor deposition chamber (21), gas introducing units (29a, 29b) for introducing a gas containing H2O into the vapor deposition chamber (21), and a partial pressure-sensing unit (29c) for measuring the partial pressure of a certain gas in the downstream of the center of the film deposition space in the vapor deposition chamber (21) in the carrying direction of the front substrate (3). The gas containing H2O is introduced through the gas introducing units (29a, 29b) for controlling the partial pressure of the gas at the partial pressure-sensing unit (29c).

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Inventors:
MAESHIMA SATOSHI
TAKII YOSHIMASA
MORITA MASASHI
HONMA YOSHIYASU
SAITOH MITSUO
Application Number:
PCT/JP2006/322433
Publication Date:
May 18, 2007
Filing Date:
November 10, 2006
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
MAESHIMA SATOSHI
TAKII YOSHIMASA
MORITA MASASHI
HONMA YOSHIYASU
SAITOH MITSUO
International Classes:
H01J9/02; C23C14/24; H01J11/02; H01J11/22; H01J11/24; H01J11/34; H01J11/36; H01J11/38; H01J11/40; H01J11/42; H01J11/50
Foreign References:
JP2005050804A2005-02-24
JP2000017431A2000-01-18
JP2005050803A2005-02-24
JPH11335820A1999-12-07
JPH10106441A1998-04-24
JP2000087225A2000-03-28
JP2005129521A2005-05-19
Attorney, Agent or Firm:
IWAHASHI, Fumio et al. (1006, Oaza Kadom, Kadoma-shi Osaka 01, JP)
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