Title:
METHOD FOR MANUFACTURING QUARTZ MEMBER, METHOD FOR FORMING SILICA COATING, AND METHOD FOR SMOOTHING SURFACE OF MEMBER MADE FROM QUARTZ
Document Type and Number:
WIPO Patent Application WO/2023/182348
Kind Code:
A1
Abstract:
A method for forming a silica coating by using a burner 4 to perform thermal spraying of silica onto an outer circumferential surface of a member 1 made from quartz, said method for forming a silica coating being characterized in that a thermally conductive material 5 with a thermal conductivity of 30 W/m∙K or greater at 25°C is fitted into an inner hole of the member 1 made from quartz, and thermal spraying is performed while an inner circumferential surface of the member 1 made from quartz and an outer circumferential surface of the thermally conductive material 5 are in contact.
Inventors:
MUNEHIRA MASAMI (JP)
KATOU YUUICHI (JP)
MIHARA SHOUZO (JP)
KATOU YUUICHI (JP)
MIHARA SHOUZO (JP)
Application Number:
PCT/JP2023/011199
Publication Date:
September 28, 2023
Filing Date:
March 22, 2023
Export Citation:
Assignee:
MITSUBISHI CHEM CORP (JP)
International Classes:
C03B29/02; C03C17/02; C03C17/04; C04B41/87; C23C4/11; C23C4/12; C23C24/08
Foreign References:
| JP2010155765A | 2010-07-15 | |||
| JPH095551A | 1997-01-10 | |||
| JP2012036038A | 2012-02-23 | |||
| JP2001151523A | 2001-06-05 | |||
| JP2004107148A | 2004-04-08 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
Download PDF:
Previous Patent: CURABLE RESIN COMPOSITION FOR ELECTRONIC MATERIAL
Next Patent: METHOD FOR PRODUCING SALICYLIC ACID ESTER
Next Patent: METHOD FOR PRODUCING SALICYLIC ACID ESTER