Title:
METHOD FOR MANUFACTURING SOLID-PHASE PIEZOELECTRIC PRECURSOR POLYMER CAPABLE OF UNDERGOING REVERSIBLE REACTION, AND METHOD FOR MANUFACTURING PIEZOELECTRIC THIN FILM USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/215761
Kind Code:
A1
Abstract:
Disclosed are: a method for manufacturing a solid-phase piezoelectric precursor polymer capable of undergoing a reversible reaction; and a method for manufacturing a piezoelectric thin film using same, wherein toxic and highly explosive organic solvent components are separated and extracted from a piezoelectric precursor solution prepared by a chemical solution synthesis method such as a sol-gel process or metal organic decomposition, and thus the precursor solution can maintain a chemically stable state without changing over time.
Inventors:
KOO CHANG-YOUNG (KR)
Application Number:
PCT/KR2021/004214
Publication Date:
October 13, 2022
Filing Date:
April 05, 2021
Export Citation:
Assignee:
QUINTESS CO LTD (KR)
International Classes:
H01L41/47; H01L41/18; H01L41/317; H01L41/37
Foreign References:
| JP2000328223A | 2000-11-28 | |||
| JP2015193524A | 2015-11-05 | |||
| KR20170117408A | 2017-10-23 | |||
| KR20110036889A | 2011-04-12 | |||
| KR101352246B1 | 2014-01-17 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
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