Title:
METHOD FOR MANUFACTURING THIN FILM BATTERY ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/146512
Kind Code:
A1
Abstract:
This method for manufacturing a thin film battery element comprises a pattern forming step, a laminate forming step, and an opening forming step. In the pattern forming step, a laser absorbing layer of a predetermined pattern is formed on a collector electrode layer. In the laminate forming step, a laminate is formed by laminating an active material layer on the collector electrode layer and the laser absorbing layer. In the opening forming step, an opening corresponding to a predetermined pattern is formed in the active material layer by irradiating the laminate with a laser and evaporating and dispersing the laser absorbing layer.
Inventors:
FUJIBAYASHI TAKASHI (JP)
KUBOTA YUSUKE (JP)
KUBOTA YUSUKE (JP)
Application Number:
PCT/JP2019/001399
Publication Date:
August 01, 2019
Filing Date:
January 18, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01M4/139; B23K26/18; H01M4/04; H01M4/38; H01M4/485; H01M4/505; H01M4/525; H01M4/66
Foreign References:
| JP2017523559A | 2017-08-17 | |||
| JPH02303696A | 1990-12-17 | |||
| US20070092637A1 | 2007-04-26 | |||
| JP2014520369A | 2014-08-21 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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