Title:
METHOD FOR MANUFACTURING THIN FILM, METHOD FOR MANUFACTURING THIN-FILM MATERIAL, PERPENDICULAR MAGNETIC RECORDING LAYER, MULTILAYER FILM SUBSTRATE, AND MAGNETIC RECORDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/085933
Kind Code:
A1
Abstract:
A method for manufacturing a thin film, the method comprising: a step for forming a thin film using at least one material among a ferromagnetic body, a ferrimagnetic body, a paramagnetic body, and a antiferromagnetic body; and a step for performing alternating electromagnetic field irradiation on at least one material simultaneously with or subsequent to the step for forming the thin film.
Inventors:
TAKIZAWA HIROTSUGU (JP)
FUKUSHIMA JUN (JP)
SASAKI YASUMASA (JP)
FUKUSHIMA JUN (JP)
SASAKI YASUMASA (JP)
Application Number:
PCT/JP2016/004909
Publication Date:
May 26, 2017
Filing Date:
November 17, 2016
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
C23C14/58; C23C14/22; C23C16/511; C23C16/56; G11B5/65; G11B5/84; G11B5/851; H01F41/18
Domestic Patent References:
| WO2015162898A1 | 2015-10-29 |
Foreign References:
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| JP2012104703A | 2012-05-31 | |||
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Other References:
YASUYUKI IWABUCHI ET AL.: "Microwave Shosha ni yoru Amorphous Nd-Fe-B no Kesshoka to Iho Seicho no Kento", KAGAKUKEI GAKUKYOKAI TOHOKU TAIKAI PROGRAM OYOBI KOEN YOKOSHU, vol. 26, 20 September 2014 (2014-09-20), pages 199
Attorney, Agent or Firm:
SUGIURA, Masatomo et al. (JP)
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