Title:
METHOD OF MEASURING THE PERFORMANCE OF AN ILLUMINATION SYSTEM
Document Type and Number:
WIPO Patent Application WO2004059395
Kind Code:
A3
Abstract:
The performance of an illumination system in, for example, a lithographic projection apparatus can be measured accurately and reliably by means of a test object (55) comprising at least one Fresnel zone lens (30) and an associated reference mark, preferably a ring (40). By superposed imaging of these and detecting and evaluating the composed image (56), telecentricity errors and aberrations of the illumination can be measured.
Inventors:
DIRKSEN PETER (NL)
JUFFERMANS CASPARUS A H (NL)
JUFFERMANS CASPARUS A H (NL)
Application Number:
PCT/IB2003/006142
Publication Date:
March 17, 2005
Filing Date:
December 18, 2003
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
DIRKSEN PETER (NL)
JUFFERMANS CASPARUS A H (NL)
DIRKSEN PETER (NL)
JUFFERMANS CASPARUS A H (NL)
International Classes:
G01M11/02; G03F7/20; (IPC1-7): G03F7/20; G01M11/02
Domestic Patent References:
| WO2003056392A1 | 2003-07-10 |
Foreign References:
| US4585342A | 1986-04-29 | |||
| US6048651A | 2000-04-11 |
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