METHOD FOR OPERATING A XENON EXCIMER LAMP AND LAMP SYSTEM COMPRISING AN EXCIMER LAMP

Title:

METHOD FOR OPERATING A XENON EXCIMER LAMP AND LAMP SYSTEM COMPRISING AN EXCIMER LAMP

Document Type and Number:

WIPO Patent Application WO/2017/008987

Kind Code:

A1

Abstract:

Known methods for operating a xenon excimer lamp comprising an outlet window made of quartz glass, comprise the method steps: (a) operating of the excimer lamp at a radiation intensity of more than 80 mW/cm2 and (b) controlling the temperature of the excimer lamp at an operating temperature. In order a method based thereon for operating a xenon excimer lamp that has a radiation intensity above 80 mW/cm2 which enables a high service life of the xenon excimer lamp, according to the invention it is proposed that the temperature of the excimer lamp be controlled at an operating temperature in the range from 181 °C to 199 °C.

Inventors:

ARNOLD ERICH (DE)
SCHILLING FRANZ-JOSEF (DE)

Application Number:

PCT/EP2016/063848

Publication Date:

January 19, 2017

Filing Date:

June 16, 2016

Export Citation:

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Assignee:

HERAEUS NOBLELIGHT GMBH (DE)

International Classes:

H01J61/52; H01J65/04

Foreign References:

JP2004221017A	2004-08-05
JP2005005258A	2005-01-06

Other References:

MARK PARAVIA: "Effizienter Betrieb von Xenon-Excimer-Entladungen bei hoher Leistungsdichte. Dissertation, Karlsruher Institut für Technologie Fakultät für Elektrotechnik und Informationstechnik", 31 May 2010 (2010-05-31), XP055290489, ISBN: 978-3-86644-501-7, Retrieved from the Internet [retrieved on 20160721]
PARAVIA, M: "Dissertation", 2010, KIT KARLSRUHE, article "Effizienter Betrieb von Xenon-Excimer-Entladungen bei hoher Leistungsdichte", pages: 48 - 50

Attorney, Agent or Firm:

HERAEUS IP (DE)

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