Title:
METHOD OF PARTICLE CONTAMINANT REMOVAL
Document Type and Number:
WIPO Patent Application WO/2010/103416
Kind Code:
A3
Abstract:
Apparatus and methods for removing particle contaminants from a surface of a substrate includes coating a layer of a viscoelastic material on the surface. The viscoelastic material is coated as a thin film and exhibits substantial liquid-like characteristic. An external force is applied to a first area of the surface coated with the viscoelastic material such that a second area of the surface coated with the viscoelastic material is not substantially subjected to the applied force. The force is applied for a time duration that is shorter than a intrinsic time of the viscoelastic material so as to access solid-like characteristic of the viscoelastic material. The viscoelastic material exhibiting solid-like characteristic interacts at least partially with at least some of the particle contaminants present on the surface. The viscoelastic material along with at least some of the particle contaminants is removed from the first area of the surface while the viscoelastic material is exhibiting solid-like characteristics.
Inventors:
SABBA YIZHAK (US)
YUN SEOKMIN (US)
KAWAGUCHI MARK (US)
WILCOXSON MARK (US)
PODLESNIK DRAGAN (US)
YUN SEOKMIN (US)
KAWAGUCHI MARK (US)
WILCOXSON MARK (US)
PODLESNIK DRAGAN (US)
Application Number:
PCT/IB2010/050842
Publication Date:
December 09, 2010
Filing Date:
February 26, 2010
Export Citation:
Assignee:
LAM RES CORP (US)
LAM RES AG (AT)
SABBA YIZHAK (US)
YUN SEOKMIN (US)
KAWAGUCHI MARK (US)
WILCOXSON MARK (US)
PODLESNIK DRAGAN (US)
LAM RES AG (AT)
SABBA YIZHAK (US)
YUN SEOKMIN (US)
KAWAGUCHI MARK (US)
WILCOXSON MARK (US)
PODLESNIK DRAGAN (US)
International Classes:
H01L21/302; H01L21/304
Foreign References:
| US5893756A | 1999-04-13 | |||
| JP2003068696A | 2003-03-07 | |||
| EP1803504A2 | 2007-07-04 |
Attorney, Agent or Firm:
KONTRUS, Gerhard (Villach, AT)
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