METHOD FOR PATTERNING ZINC OXIDE TRANSPARENT CONDUCTIVE FILM

Title:

METHOD FOR PATTERNING ZINC OXIDE TRANSPARENT CONDUCTIVE FILM

Document Type and Number:

WIPO Patent Application WO/2007/072950

Kind Code:

A1

Abstract:

Disclosed is a method for patterning a zinc oxide transparent conductive film which enables to improve patterning characteristics by controlling the etching rate of the zinc oxide transparent conductive film. Specifically, when a zinc oxide transparent conductive film, which mainly contains zinc oxide while additionally containing at least one element selected from group IV elements of the periodic table, is patterned by etching, the zinc oxide transparent conductive film is treated with water before the etching step.

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Inventors:

TAKAHASHI SEIICHIRO (JP)
TABIRA YASUNORI (JP)
TAKAHASHI HIROKI (JP)
MIYASHITA NORIHIKO (JP)
YANO TOMOYASU (JP)

Application Number:

PCT/JP2006/325656

Publication Date:

June 28, 2007

Filing Date:

December 22, 2006

Export Citation:

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Assignee:

MITSUI MINING & SMELTING CO (JP)
TAKAHASHI SEIICHIRO (JP)
TABIRA YASUNORI (JP)
TAKAHASHI HIROKI (JP)
MIYASHITA NORIHIKO (JP)
YANO TOMOYASU (JP)

International Classes:

H01L21/306

Foreign References:

JPS62154411A	1987-07-09
JPH0845352A	1996-02-16
JPS6292622A	1987-04-28
JPH04256317A	1992-09-11

Attorney, Agent or Firm:

KURIHARA, Hiroyuki et al. (Iwasaki Bldg. 6F 3-15, Hiroo 1-chom, Shibuya-ku Tokyo 12, JP)

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