Title:
METHOD FOR PREPARING PATTERNED POLYMER
Document Type and Number:
WIPO Patent Application WO/2021/000851
Kind Code:
A1
Abstract:
A method for preparing a patterned polymer, in the technical field of microfluidic chips, the method comprising the following steps: S1: photoresist spraying; S2: pattern transfer; S3: solution developing; S4: polymer coating; S5: polymer dissolving; and S6: photoresist de-molding.
Inventors:
LI YUANHANG (CN)
Application Number:
PCT/CN2020/099216
Publication Date:
January 07, 2021
Filing Date:
June 30, 2020
Export Citation:
Assignee:
SHENZHEN CAREST TECH CO LTD (CN)
International Classes:
G03F7/00
Foreign References:
| CN1832104A | 2006-09-13 | |||
| KR20100036658A | 2010-04-08 | |||
| US5147740A | 1992-09-15 | |||
| US6383952B1 | 2002-05-07 | |||
| CN101399188A | 2009-04-01 |
Attorney, Agent or Firm:
CENFO INTELLECTUAL PROPERTY AGENCY (CN)
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