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Title:
METHOD FOR PREPARING PROTECTIVE COATING FOR PLASMA ETCHING CHAMBER OF IC EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2020/168679
Kind Code:
A1
Abstract:
Disclosed is a method for preparing a protective coating for a plasma etching chamber of a piece of IC equipment, the method comprising depositing a mixed powder of Al and Y2O3-ZrO2 at a high speed by using a cold spraying and deposition technique. For the cold spraying, compressed air is used as a working gas, the spraying distance is 10-60 mm, the spraying temperature is 200-600 ºC, the gas pressure is 1.5-3 MPa, and a powder particle size is 1-50 µm. A metal ceramic protective coating, which is uniformly distributed, is formed on a surface of the plasma etching chamber. The coating can reduce or prevent the corrosion of the etching chamber by corrosive gases and the contamination of a chip by plasma, and can improve the service life of the plasma etching chamber during the production of a chip. The method comprises: firstly mixing Al and Y2O3-ZrO2 powders in proportion until uniform, and drying same; and secondly, spraying the powder on a surface of a substrate by using the cold spraying and deposition technique, so as to obtain a metal ceramic composite coating by controlling process parameters. The method has a high deposition efficiency, and the thickness of the coating can be adjusted at will according to the actual use, so that same can be used to prepare a thick protective coating for a plasma etching chamber of a piece of IC equipment.

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Inventors:
ZHENG GUANGWEN (CN)
HOU TAO (CN)
XIONG TIANYING (CN)
CUI XINYU (CN)
SHEN YANFANG (CN)
Application Number:
PCT/CN2019/097064
Publication Date:
August 27, 2020
Filing Date:
July 22, 2019
Export Citation:
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Assignee:
SHENYANG FORTUNE PREC EQUIPMENT CO LTD (CN)
International Classes:
C23C24/04; C22C29/12
Foreign References:
CN109825827A2019-05-31
CN107709611A2018-02-16
CN104294206A2015-01-21
CN108610087A2018-10-02
CN109338270A2019-02-15
CN106591820A2017-04-26
US20130344255A12013-12-26
Attorney, Agent or Firm:
SHENYANG UPDATE INTELLECTUAL PROPERTY AGENCY (CN)
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