Title:
METHOD FOR PRODUCING JOINED BODY AND DEVICE FOR PRODUCING JOINED BODY
Document Type and Number:
WIPO Patent Application WO/2023/276473
Kind Code:
A1
Abstract:
A joining step in this method for producing a joined body comprises a support step in which a layered body is mounted to a support device and a pressing step in which the layered body is pressed. The support device includes a pressing member that is a transparent glass plate formed in a circular shape. The support device includes a seal member configured so as to surround the layered body in a circular shape between the pressing member and a base member. In the pressing step, the pressing member is brought into close contact with the seal member by lowering the air pressure of an accommodation space by means of an air pressure adjustment device, and the layered body is pressed by the pressing member.
Inventors:
SHIRAGAMI TORU (JP)
Application Number:
PCT/JP2022/020545
Publication Date:
January 05, 2023
Filing Date:
May 17, 2022
Export Citation:
Assignee:
NIPPON ELECTRIC GLASS CO (JP)
International Classes:
C03C27/10; H01L23/02
Foreign References:
| JP2021062983A | 2021-04-22 | |||
| JP2021031306A | 2021-03-01 | |||
| JP2018199600A | 2018-12-20 | |||
| US20180134023A1 | 2018-05-17 | |||
| JP2015534528A | 2015-12-03 |
Attorney, Agent or Firm:
SHIROMURA Kunihiko et al. (JP)
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