Title:
METHOD FOR PRODUCING LIGHT-TRANSMITTING CONDUCTIVE SHEET
Document Type and Number:
WIPO Patent Application WO/2021/240962
Kind Code:
A1
Abstract:
According to this method for producing a light-transmitting conductive sheet 1, a light-transmitting conductive layer 3 is formed on a base material sheet 2 by a plurality of times of sputtering, wherein electric power is applied to each one of a plurality of targets 51, 52, 53 and 54. This method comprises: a first step wherein an inner layer 6 is formed on the base material sheet 2 by applying electric power to a first target 51 that is formed of an indium-tin composite oxide that has a tin oxide content of more than 8% by mass; and a second step wherein an outer layer 22 is formed on the inner layer 6 by applying electric power to each one of a second target 52 that is formed of an indium-tin composite oxide, a third target 53 that is formed of an indium-tin composite oxide and a fourth target 54 that is formed of an indium-tin composite oxide. The ratio of the power density P1 of the first target 51 to the total power density P of the second target 52, the third target 53 and the fourth target 54, namely P1/P is 0.20 or less.
Inventors:
FUJINO NOZOMI (JP)
KARASUDA TAISUKE (JP)
KARASUDA TAISUKE (JP)
Application Number:
PCT/JP2021/011147
Publication Date:
December 02, 2021
Filing Date:
March 18, 2021
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
C23C14/08; B32B7/023; B32B9/00; B32B37/14; H01B5/14
Domestic Patent References:
| WO2015115237A1 | 2015-08-06 | |||
| WO2016152808A1 | 2016-09-29 | |||
| WO2012161095A1 | 2012-11-29 | |||
| WO2016163323A1 | 2016-10-13 | |||
| WO2015151687A1 | 2015-10-08 |
Foreign References:
| JP2015063743A | 2015-04-09 |
Attorney, Agent or Firm:
OKAMOTO, Hiroyuki et al. (JP)
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