Title:
METHOD FOR PRODUCING A MICROMECHANICAL LAYER STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2019/137705
Kind Code:
A1
Abstract:
The invention relates to a method for producing a micromechanical layer structure, having the steps of: - providing a first protective layer, said first protective layer being structured with at least one access which is filled with a sacrificial layer material, - applying a functional-layer layer structure, comprising at least one functional layer, onto the first protective layer, - producing a first access in the functional-layer layer structure in order to form at least one access of the first protective layer such that the width of the first access in the functional-layer layer structure in at least one of the layers of the functional-layer layer structure is greater than or equal to the width of the at least one access of the first protective layer, - applying a second protective layer onto the functional-layer layer structure such that the first access is filled with material of the second protective layer, - structuring the second protective layer and the filled first access with a second access to the first protective layer, wherein the second access has the same or a smaller width than the first access such that if the second access has a smaller width, the walls of the second access are produced by the material of the second protective layer, - removing sacrificial layer material at least in the access of the first protective layer, and - removing protective layer material at least in the second access.
Inventors:
MAJONI STEFAN (DE)
Application Number:
PCT/EP2018/083829
Publication Date:
July 18, 2019
Filing Date:
December 06, 2018
Export Citation:
Assignee:
BOSCH GMBH ROBERT (DE)
International Classes:
C23C28/00; C23F1/12; H01L41/083; H01L41/331; H01L41/332; H01L41/35
Foreign References:
| US20100125988A1 | 2010-05-27 | |||
| US20050274191A1 | 2005-12-15 | |||
| US20040050161A1 | 2004-03-18 | |||
| US20040125970A1 | 2004-07-01 |
Other References:
None
Download PDF:
Previous Patent: INDUSTRIAL PROCESS DATA PROCESSING
Next Patent: METHOD AND SYSTEM FOR INTEGRATING DATA RECEIVED FROM ONE OR MORE DATA SOURCES
Next Patent: METHOD AND SYSTEM FOR INTEGRATING DATA RECEIVED FROM ONE OR MORE DATA SOURCES