METHOD FOR PRODUCING NANOCARBON MATERIAL AND METHOD FOR MANUFACTURING WIRING STRUCTURE

Title:

METHOD FOR PRODUCING NANOCARBON MATERIAL AND METHOD FOR MANUFACTURING WIRING STRUCTURE

Document Type and Number:

WIPO Patent Application WO/2005/003409

Kind Code:

A1

Abstract:

By conducting electrolysis in an electrolytic solution containing an organic solvent using a semiconductor on which a catalyst metal is formed non-uniformly as a cathode, a nanocarbon material is formed on the surface of the catalyst metal.

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Inventors:

YOKOMICHI HARUO (JP)

Application Number:

PCT/JP2003/016831

Publication Date:

January 13, 2005

Filing Date:

December 25, 2003

Export Citation:

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Assignee:

JAPAN SCIENCE & TECH AGENCY (JP)
YOKOMICHI HARUO (JP)

International Classes:

C25D7/12; C01B31/02; C25D5/02; C25D9/04; C25D9/08; (IPC1-7): C25B1/00; C01B31/02; H01L21/60; H01L23/52

Domestic Patent References:

WO2003000590A1	2003-01-03
WO2004000728A1	2003-12-31

Foreign References:

JPH10167714A	1998-06-23
JP2003115259A	2003-04-18
JP2004071654A	2004-03-04

Other References:

YOKOMICHI, H. "Ekisochu ni okeru Shitsuon deno Nano Carbon no Gosei", 2003 Nen Shunki Dai 50 Kai Oyo Butsurigaku Kankei Rengo Koenkai Koen Yokoshu, 27 March 2003, No. 2, page 1030
YOKOMICHI, H. "Electrochemical Deposition of Nanosize-Carbons, Dai 24 Kai Fullerene.Nanotube Sogo Symposium Koen Yoshishu, 08 January 2003, page 36

Attorney, Agent or Firm:

Shimoda, Akira (Kyobashi-Nichiei Biru 3-4, Kyobashi 3-chom, Chuo-ku Tokyo, JP)

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