Title:
METHOD FOR PRODUCING NITRIDE OF ZIRCONIUM
Document Type and Number:
WIPO Patent Application WO/2019/077820
Kind Code:
A1
Abstract:
Provided is a method for producing, as a nitride of zirconium, an inorganic substance which has the same crystal structure as that of a cubic zirconium nitride represented by Zr3N4 with good reproducibility under low pressure. This method for producing a nitride of zirconium which is an inorganic substance that has the same crystal structure as that of a cubic zirconium nitride represented by Zr3N4 includes a step of reacting a raw material powder that comprises powder of a halogenide of zirconium and powder of a nitride of a group 2 element in a temperature range of higher than 1100°C and 2500°C or lower under a pressure of 5 to 8 GPa.
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| JPS5978912 | MANUFACTURE OF TITANIUM NITRIDE POWDER |
| WO/2000/065649 | CVD TiN PLUG FORMATION FROM TITANIUM HALIDE PRECURSORS |
Inventors:
KAWAMURA FUMIO (JP)
TANIGUCHI TAKASHI (JP)
TANIGUCHI TAKASHI (JP)
Application Number:
PCT/JP2018/026665
Publication Date:
April 25, 2019
Filing Date:
July 17, 2018
Export Citation:
Assignee:
NAT INST MATERIALS SCIENCE (JP)
International Classes:
C01B21/076; B01J3/06; C30B1/12; C30B29/38; C30B33/02
Foreign References:
| US5110768A | 1992-05-05 | |||
| JPH01502975A | 1989-10-12 | |||
| JPS60186407A | 1985-09-21 | |||
| JP2002506787A | 2002-03-05 |
Other References:
ALI, S. ET AL.: "Solid state metathesis routes to metal nitrides; use of strontium and barium nitrides as regents and dilution effects", POLYHEDRON, vol. 16, no. 20, 1997, pages 3635 - 3640, XP002600053, ISSN: 0277-5387
Attorney, Agent or Firm:
ASAMURA PATENT OFFICE, P.C. (JP)
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