Title:
METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT AND VACUUM DRYING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/015198
Kind Code:
A1
Abstract:
The present invention is a method for producing an organic semiconductor element having plurality of organic semiconductor layers layered between a pair of a positive electrode and a negative electrode facing each other on a substrate. The production method includes a coating step for forming an organic semiconductor coating liquid film by wet deposition from an organic semiconductor coating liquid including a solute as an organic semiconductor layer and a solvent for dispersing the solute, and a drying step for drying the organic semiconductor coating liquid film inside a vacuum chamber. In the drying step, the interior of the vacuum chamber is exhausted from atmosphere pressure to a pressure of 60 Pa at an exhausting speed of 0.5 seconds to 10 seconds inclusive.
Inventors:
NAOI TARO (JP)
TANAKA YOHEI (JP)
HATAKEYAMA TAKUYA (JP)
TANAKA YOHEI (JP)
HATAKEYAMA TAKUYA (JP)
Application Number:
PCT/JP2012/068359
Publication Date:
January 31, 2013
Filing Date:
July 19, 2012
Export Citation:
Assignee:
PIONEER CORP (JP)
MITSUBISHI CHEM CORP (JP)
NAOI TARO (JP)
TANAKA YOHEI (JP)
HATAKEYAMA TAKUYA (JP)
MITSUBISHI CHEM CORP (JP)
NAOI TARO (JP)
TANAKA YOHEI (JP)
HATAKEYAMA TAKUYA (JP)
International Classes:
H05B33/10; F26B5/04; H01L51/50
Foreign References:
| JP2001276726A | 2001-10-09 | |||
| JP2003257640A | 2003-09-12 |
Attorney, Agent or Firm:
FUJIMURA PATENT BUREAU, P. C. (JP)
Patent business corporation Toson joint patent firm (JP)
Patent business corporation Toson joint patent firm (JP)
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Claims: