METHOD FOR PRODUCING RESIN FILM HAVING FINE PATTERN, METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE, BASE FILM FOR FORMING FINE PATTERN, AND RESIN FILM PROVIDED WITH SUPPORT MEMBER

WIPO Patent Application WO/2017/056656

A1

Provided are: a method for producing a resin film which is formed of a resin material and which has a fine pattern that is accurately formed as in a vapor deposition mask or an optical element; a method for producing an organic EL display device; a base film for forming a fine pattern; and a resin film provided with a support member. A liquid resin material is applied onto a support member to form a resin-coated film (S1), and the temperature of the resin-coated film is increased to a temperature at which the resin material is cured, to form a baked resin film (S2). Thereafter, a base film in which the baked resin film is attached to the support member is processed by irradiation with laser light, to form a support member-provided resin film (1b) having a desired fine pattern (S3). Thereafter, the baked resin film on which the fine pattern is formed is peeled from the support member, so that the resin film having the fine pattern is obtained (S5).

NISHIDA KOSHI (JP)
YANO KOZO (JP)
KISHIMOTO KATSUHIKO (JP)
SAKIO SUSUMU (JP)
TAKEI HIDEO (JP)

PCT/JP2016/071617

April 06, 2017

July 22, 2016

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FOXCONN JAPAN RD CO LTD (JP)

C23C14/04; H01L51/50; H05B33/10

WO2014115477A1	2014-07-31
WO2013039196A1	2013-03-21
WO2015034097A1	2015-03-12
WO2016056515A1	2016-04-14

JP2005519187A	2005-06-30
JP2014067500A	2014-04-17
JP2005014043A	2005-01-20

ASAHINA & CO. (JP)

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