Title:
METHOD OF PRODUCING A RESONATOR
Document Type and Number:
WIPO Patent Application WO/2013/092920
Kind Code:
A3
Abstract:
The present invention relates to a method of fabricating a resonator in a substrate, characterized in that it comprises the following steps: a) modifying the structure of at least one zone of the substrate so as to render said at least one zone more selective; b) etching said at least zone so as to selectively fabricate said resonator.
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Inventors:
HESSLER THIERRY (CH)
DALLA PIAZZA SILVIO (CH)
DALLA PIAZZA SILVIO (CH)
Application Number:
PCT/EP2012/076498
Publication Date:
October 03, 2013
Filing Date:
December 20, 2012
Export Citation:
Assignee:
SWATCH GROUP RES & DEV LTD (CH)
International Classes:
B23K26/00; G04F5/06; B81C1/00; G02B6/12; G04B17/06; G04B17/34; G04C3/12; G04G17/02
Domestic Patent References:
| WO2011154701A1 | 2011-12-15 | |||
| WO2002016070A2 | 2002-02-28 |
Foreign References:
| US20110034031A1 | 2011-02-10 | |||
| US20020139769A1 | 2002-10-03 | |||
| US20030235385A1 | 2003-12-25 | |||
| US20110127883A1 | 2011-06-02 | |||
| US20070115079A1 | 2007-05-24 | |||
| EP1818736A1 | 2007-08-15 | |||
| CH702708B1 | 2011-08-31 | |||
| EP2105807A1 | 2009-09-30 | |||
| EP2317406A1 | 2011-05-04 |
Attorney, Agent or Firm:
ICB INGÉNIEURS CONSEILS EN BREVETS SA (Neuchâtel, CH)
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