Title:
METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE SUBSTRATES WITH SURFACE ELECTRODES, AND METHOD FOR PRODUCING THIN-FILM SOLAR CELLS
Document Type and Number:
WIPO Patent Application WO/2012/053569
Kind Code:
A1
Abstract:
A transparent conductive substrate with surface electrode (11b), formed by sputtering a zinc oxide crystalline transparent conductive film (uneven film (22)), which has an uneven structure (2a) formed on the surface, on a translucent glass substrate (1) as a surface electrode (2), is treated with heat at 400 to 550°C in a hydrogen gas atmosphere of 0.1 to 100 Pa. As a result, a surface electrode (2) with a higher light-trapping effect can be provided, and a thin-film solar cell (10) with higher photoelectric conversion efficiency can be obtained.
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Inventors:
YAMANOBE YASUNORI (JP)
MATSUMURA FUMIHIKO (JP)
MATSUMURA FUMIHIKO (JP)
Application Number:
PCT/JP2011/074078
Publication Date:
April 26, 2012
Filing Date:
October 19, 2011
Export Citation:
Assignee:
SUMITOMO METAL MINING CO (JP)
YAMANOBE YASUNORI (JP)
MATSUMURA FUMIHIKO (JP)
YAMANOBE YASUNORI (JP)
MATSUMURA FUMIHIKO (JP)
International Classes:
H01L31/04; H01B13/00
Domestic Patent References:
| WO2010104111A1 | 2010-09-16 | |||
| WO2009084527A1 | 2009-07-09 |
Foreign References:
| JP2010034232A | 2010-02-12 | |||
| JPH07131044A | 1995-05-19 | |||
| JP2011009069A | 2011-01-13 |
Other References:
J. F. CHANG ET AL.: "Effects ot post-annealing on the structure and properties of Al-doped zinc oxide films", APPLIED SURFACE SCIENCE, vol. 183, no. 1/2, 12 November 2011 (2011-11-12), pages 18 - 25
Attorney, Agent or Firm:
KOIKE, Akira et al. (JP)
Akira Koike (JP)
Akira Koike (JP)
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Claims: