Title:
METHOD FOR PRODUCING TUNGSTEN HEXAFLUORIDE, METHOD FOR PURIFYING SAME, AND TUNGSTEN HEXAFLUORIDE
Document Type and Number:
WIPO Patent Application WO/2020/196246
Kind Code:
A1
Abstract:
A method for producing tungsten hexafluoride according to the present invention comprises: a reaction step wherein a mixture that contains tungsten hexafluoride and a trivalent arsenic compound is obtained by reacting a fluorine-containing compound gas with tungsten containing arsenic or an arsenic compound; and a distillation step wherein the mixture is purified by distillation so as to separate and remove a fraction that contains the trivalent arsenic compound and thereby obtain tungsten hexafluoride.
Inventors:
OHASHI MITSUYA (JP)
HAMANA TAKANORI (JP)
OGATA TAKANORI (JP)
NAKAMURA RYUICHI (JP)
HAMANA TAKANORI (JP)
OGATA TAKANORI (JP)
NAKAMURA RYUICHI (JP)
Application Number:
PCT/JP2020/012265
Publication Date:
October 01, 2020
Filing Date:
March 19, 2020
Export Citation:
Assignee:
CENTRAL GLASS CO LTD (JP)
International Classes:
C01G41/04
Foreign References:
| JP2000072442A | 2000-03-07 | |||
| JP2003238161A | 2003-08-27 | |||
| JP2001172020A | 2001-06-26 | |||
| JP2019019024A | 2019-02-07 |
Attorney, Agent or Firm:
HAYAMI Shinji (JP)
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