Title:
METHOD FOR RECIPROCATING A WORKPIECE THROUGH AN ION BEAM
Document Type and Number:
WIPO Patent Application WO2005097640
Kind Code:
A3
Abstract:
A method for reciprocally transporting a workpiece on a scan arm through an ion beam is provided, wherein the scan arm is operable coupled to a motor comprising a rotor and stator that are individually rotatable about a first axis. An electromagnetic force applied between the rotor and stator rotates the rotor about the first axis and translates the workpiece through the ion beam along a first scan path. A position of the workpiece is sensed and the electromagnetic force between the rotor and stator is controlled in order to reverse the direction of motion of the workpiece along the first scan path, and wherein the control is based, at least in part, on the sensed position of the workpiece. The stator further rotates about the first axis in reaction to the rotation of the rotor, particularly in the reversal of direction of motion of the workpiece, thus acting as a reaction mass to the rotation of one or more of the rotor, scan arm, and workpiece.
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Inventors:
VANDERPOT JOHN (US)
Application Number:
PCT/US2005/011581
Publication Date:
December 08, 2005
Filing Date:
April 05, 2005
Export Citation:
Assignee:
AXCELIS TECH INC (US)
VANDERPOT JOHN (US)
POLLACK JOHN (US)
BERRIAN DONALD (US)
VANDERPOT JOHN (US)
POLLACK JOHN (US)
BERRIAN DONALD (US)
International Classes:
A61N5/00; B65H1/00; H01J37/317; H01L21/00; H01L21/687; (IPC1-7): H01J37/317
Foreign References:
| EP1056114A2 | 2000-11-29 | |||
| EP1047101A2 | 2000-10-25 | |||
| US20030192474A1 | 2003-10-16 |
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