Title:
METHOD OF SUPPLYING SPUTTERING TARGETS TO FABRICATORS AND OTHER USERS
Document Type and Number:
WIPO Patent Application WO2004074532
Kind Code:
A8
Abstract:
A method of supplying a sputter target, including, supplying a sputtering target assembly to a user or an agent thereof where a sputter target of the sputtering target assembly is sputtered to form a spent target assembly; determining an amount of the sputter target consumed by the sputtering; and charging the user based on the amount sputtered or an amount not returned, is described.
Inventors:
MICHALUK CHRISTOPHER A (US)
STERSHIC MATTHEW T (US)
FORD ROBERT B (US)
STERSHIC MATTHEW T (US)
FORD ROBERT B (US)
Application Number:
PCT/US2004/004050
Publication Date:
February 03, 2005
Filing Date:
February 12, 2004
Export Citation:
Assignee:
CABOT CORP (US)
MICHALUK CHRISTOPHER A (US)
STERSHIC MATTHEW T (US)
FORD ROBERT B (US)
MICHALUK CHRISTOPHER A (US)
STERSHIC MATTHEW T (US)
FORD ROBERT B (US)
International Classes:
C23C14/34; G06Q10/06; G06Q30/02; (IPC1-7): G06F17/60
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