Title:
METHOD FOR SUPPLYING TEMPERATURE-REGULATED FLUID TO TEMPERATURE CONTROL SYSTEM, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2014/014127
Kind Code:
A1
Abstract:
To a temperature control system (1) provided with: a combination flow path (71) through which fluid from a low-temperature flow path (76) in which a variable valve (79a) is provided and a high-temperature flow path (77) in which a variable valve (79c) is provided is supplied to a temperature regulation unit (70); a bypass flow path (73) in which a variable valve (79b) is provided and through which the fluid flowing through a recovery flow path (72) through which the fluid supplied to the temperature regulation unit (70) is recovered is circulated to the temperature regulation unit (70); a circulation pump (87) which is provided in the recovery flow path (72); and a tank (78) which is provided on the upstream side from the circulation pump (87) and from which the fluid flows out to the circulation pump (87) when the amount of the fluid reaches a fixed amount, the fluid is supplied with the variable valves (79a, 79b) being opened at predetermined valve opening degrees. After it is detected that the amount of the fluid reaches the fixed amount in the tank (78), the fluid is supplied for a predetermined time with the variable valves (79b, 79c) being opened at predetermined valve opening degrees, and the circulation pump (87) is started while being filled with the fluid.
Inventors:
TABUCHI ATSUHIKO (JP)
Application Number:
PCT/JP2013/070123
Publication Date:
January 23, 2014
Filing Date:
July 18, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G05D23/19; G05D16/20
Foreign References:
| JP2009015594A | 2009-01-22 | |||
| JP2011094927A | 2011-05-12 |
Attorney, Agent or Firm:
BECCHAKU Shigehisa et al. (JP)
Role of another Shigehisa (JP)
Role of another Shigehisa (JP)
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