Title:
METHOD AND SYSTEM FOR CONTROLLING LOT RISK SCORE BASED DYNAMIC LOT MEASUREMENT ON BASIS OF EQUIPMENT RELIABILITY INDEX
Document Type and Number:
WIPO Patent Application WO/2018/230853
Kind Code:
A1
Abstract:
A method and a system for controlling a lot risk score based dynamic lot measurement on the basis of equipment reliability index are provided. The method for controlling a measurement, according to an embodiment of the present invention, calculates an equipment reliability index of specific equipment for a specific process in semiconductor manufacturing, calculates a risk score of the specific equipment for the specific process on the basis of an equipment reliability index, and determines, on the basis of the risk score, whether to measure a semiconductor product processed by the specific equipment for the specific process. Therefore, differential quality monitoring and management is possible according to the equipment reliability index, a measuring instrument can be efficiently used, quality and yield can be improved through timely measurement, and management convenience can be increased through automatic and dynamic lot measurement control.
Inventors:
HONG TAE YOUNG (KR)
PARK JIN WOO (KR)
PARK JIN WOO (KR)
Application Number:
PCT/KR2018/005943
Publication Date:
December 20, 2018
Filing Date:
May 25, 2018
Export Citation:
Assignee:
SK HOLDINGS CO LTD (KR)
International Classes:
G05B19/4065; G05B23/02; G06F17/10; H01L21/67
Foreign References:
| JP2008235303A | 2008-10-02 | |||
| JP4736613B2 | 2011-07-27 | |||
| JP2010118562A | 2010-05-27 | |||
| KR20110101761A | 2011-09-16 | |||
| JP2005173911A | 2005-06-30 |
Attorney, Agent or Firm:
HAN, Gee Na (KR)
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