Title:
METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER
Document Type and Number:
WIPO Patent Application WO/2010/151466
Kind Code:
A3
Abstract:
A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
Inventors:
NAGARKATTI SIDDHARTH (US)
TIAN FENG (US)
LAM DAVID (US)
RASHID ABDUL (US)
BENZERROUK SOUHEIL (US)
BYSTRYAK ILYA (US)
MENZER DAVID (US)
SCHUSS JACK J (US)
AMBROSINA JESSE E (US)
TIAN FENG (US)
LAM DAVID (US)
RASHID ABDUL (US)
BENZERROUK SOUHEIL (US)
BYSTRYAK ILYA (US)
MENZER DAVID (US)
SCHUSS JACK J (US)
AMBROSINA JESSE E (US)
Application Number:
PCT/US2010/038790
Publication Date:
November 17, 2011
Filing Date:
June 16, 2010
Export Citation:
Assignee:
MKS INSTR INC (US)
NAGARKATTI SIDDHARTH (US)
TIAN FENG (US)
LAM DAVID (US)
RASHID ABDUL (US)
BENZERROUK SOUHEIL (US)
BYSTRYAK ILYA (US)
MENZER DAVID (US)
SCHUSS JACK J (US)
AMBROSINA JESSE E (US)
NAGARKATTI SIDDHARTH (US)
TIAN FENG (US)
LAM DAVID (US)
RASHID ABDUL (US)
BENZERROUK SOUHEIL (US)
BYSTRYAK ILYA (US)
MENZER DAVID (US)
SCHUSS JACK J (US)
AMBROSINA JESSE E (US)
International Classes:
H02J17/00
Domestic Patent References:
| WO2008085504A2 | 2008-07-17 | |||
| WO1996019028A1 | 1996-06-20 | |||
| WO2006091499A2 | 2006-08-31 | |||
| WO2006133204A2 | 2006-12-14 |
Attorney, Agent or Firm:
FLOCKHART-SHANKS, Brenda (LLPOne International Plac, Boston MA, US)
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