Title:
A METHOD AND A SYSTEM FOR HEIGHT TRIANGULATION MEASUREMENT
Document Type and Number:
WIPO Patent Application WO2005104658
Kind Code:
A3
Abstract:
A method and a system for height triangulation measurement are disclosed. The method and the system are particularly useful for measuring the height of an object on a surface e.g., bumps or small wafer. Three steps do the measurement. The first step is illuminating the object from a known angle with a narrow strip of light being spatially incoherent, having a large numerical aperture along the light strip and a small numerical aperture perpendicular to the light strip. The second step is imaging the object from a known angle having said large numerical aperture along the light strip and the small numerical aperture perpendicular to the light strip, having an image that includes the object and the light strip and the last step is calculating the height of the object from the location of the light strip on the image.
Inventors:
BEN-LEVI MEIR (IL)
Application Number:
PCT/IL2005/000455
Publication Date:
April 06, 2006
Filing Date:
May 01, 2005
Export Citation:
Assignee:
CAMTEK LTD (IL)
BEN-LEVI MEIR (IL)
BEN-LEVI MEIR (IL)
International Classes:
G01B11/02; G01B11/06; H05K13/04; H05K13/08; G01C; (IPC1-7): G01C3/08; G01B11/24; G01B11/30
Foreign References:
| US5818061A | 1998-10-06 | |||
| US6181424B1 | 2001-01-30 | |||
| US5028799A | 1991-07-02 | |||
| US3187185A | 1965-06-01 | |||
| US6340109B2 | 2002-01-22 |
Other References:
See also references of EP 1756513A4
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