METHOD OF TESTING PERFORMANCE OF DEVICE FOR MEASURING PHYSICAL QUANTITY BY USING CHANGE OF DISTANCE BETWEEN ELECTRODES AND PHYSICAL QUANTITY MEASURING DEVICE PROVIDED WITH FUNCTION OF EXECUTING THIS METHOD

Title:

Document Type and Number:

WIPO Patent Application WO/1992/017759

Kind Code:

A1

Abstract:

A fixed base plate (10) having a rigidity and a flexible base plate (20) are so provided as to face each other. The peripheries of both the base plates are fixed on a casing (40) of a device. An acting body (30) is bonded to the lower surface of the flexible base plate. Testing electrodes (11t, 13t, 15t) are formed on the lower surface of the fixed base plate and further fixed electrodes (11, 13, 15) are formed under the testing electrodes via an insulation layer (16). Displacement electrodes (21, 23, 25) are formeed on the upper surface of the flexible base plate. When an acceleration acts on the acting body, the flexible base plate bends and the distances between the fixed electrodes and the displacement electrodes changes, causing the capacitance between the electrodes to change. The acted acceleration can be measured by measuring the capacitance changed. For testing the performance of the device, a Coulomb force is made to act on the testing electrodes and the displacment electrodes by applying voltages across both the electrodes. The flexible base plate is bent due to the Coulomb forces and there is the same state as the one when the acceleration acts. The testing of the performance becomes possible by measuring the change of the capacitance between the fixed electrodes and the displacement electrodes in this state.

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Inventors:

OKADA KAZUHIRO (JP)

Application Number:

PCT/JP1991/000428

Publication Date:

October 15, 1992

Filing Date:

March 30, 1991

Export Citation:

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Assignee:

OKADA KAZUHIRO (JP)

International Classes:

G01L5/16; G01L25/00; G01P15/09; G01P15/125; G01P21/00; (IPC1-7): G01L25/00; G01P21/00

Foreign References:

JPS6385461A	1988-04-15
JPS6085342A	1985-05-14
JPS63128682A	1988-06-01

Other References: