Title:
METHOD FOR UPDATING PROCESSES AND ANALYZING CAUSES OF DEFECTS IN SEMICONDUCTOR DEVICE MANUFACTURING PROCESS
Document Type and Number:
WIPO Patent Application WO/2022/114343
Kind Code:
A1
Abstract:
A method for updating processes and analyzing causes of defects in a semiconductor device manufacturing process comprises the steps of: (a) comparing new sensor data obtained from one or more sensors used in the semiconductor device manufacturing process with the range of reference sensor data in a preset normal process so as to determine the presence of abnormalities in each of the processes; (b) determining the corresponding process to be a normal process and updating the new sensor data as the reference sensor data in a process reference database if it is determined that the new sensor data is within a preset allowable range of the reference sensor data in step (a), and determining the corresponding process to be an abnormal process if it is determined that the new sensor data is outside the preset allowable range of the reference sensor data in step (a); (c) searching a process defect database for the cause of the abnormality of the process determined to be the abnormal process in step (b); (d) performing follow-up measures for the cause of the abnormality if the cause of the abnormality of the process determined to be the abnormal process is found in step (c), and analyzing the cause of the abnormality of the abnormal process if the cause of the abnormality of the process determined to be the abnormal process cannot be found in step (c); and (e) updating, in the process defect database, the cause of the abnormality of the abnormal process analyzed by step (d).
Inventors:
HA SEUNG JAE (KR)
Application Number:
PCT/KR2020/017619
Publication Date:
June 02, 2022
Filing Date:
December 04, 2020
Export Citation:
Assignee:
AIBIZ CO LTD (KR)
International Classes:
H01L21/67; H01L21/66
Foreign References:
| JP4044443B2 | 2008-02-06 | |||
| JP2001284201A | 2001-10-12 | |||
| US20200184353A1 | 2020-06-11 | |||
| KR101538480B1 | 2015-07-22 | |||
| KR100570528B1 | 2006-04-13 |
Attorney, Agent or Firm:
LIM, Sang Yeob (KR)
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