Title:
METHOD AND VACUUM SYSTEM FOR REMOVING METALLIC BY-PRODUCTS
Document Type and Number:
WIPO Patent Application WO/2014/062006
Kind Code:
A1
Abstract:
Provided is a method for removing metallic by-products, comprising: a step of performing a deposition process using a metal precursor in a process chamber; a step of treating the exhaust gas including the residual metal precursor transferred from the process chamber with plasma; a step of treating the metallic by-products generated in the plasma treating step with oxidizing gas to generate metal oxide; and a step of discharging the metal oxide by pumping.
Inventors:
KO GYOUNG O (KR)
NOH MYUNG KEUN (KR)
NOH MYUNG KEUN (KR)
Application Number:
PCT/KR2013/009267
Publication Date:
April 24, 2014
Filing Date:
October 16, 2013
Export Citation:
Assignee:
CLEAN FACTORS CO LTD (KR)
International Classes:
C23C16/44; C23C16/50
Foreign References:
| KR20000016868A | 2000-03-25 | |||
| KR101065013B1 | 2011-09-15 | |||
| KR20010043555A | 2001-05-25 | |||
| KR20060013046A | 2006-02-09 | |||
| KR20080056134A | 2008-06-20 |
Attorney, Agent or Firm:
LEE, SUNG HA (KR)
이성하 (KR)
이성하 (KR)
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