Title:
METHOD FOR WASHING GAS SUPPLY PART IN GAS INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/174729
Kind Code:
A1
Abstract:
Provided is a method for washing a gas supply part in a gas inspection apparatus that washes a gas supply part (8) for supplying sample gas to an inspection unit from supply ports (P01 to P12) via a supply channel, wherein a bag body containing nitrogen gas in a sealed state is connected to the supply ports (P01 to P12) and the supply channel is depressurized for a given length of time.
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Inventors:
HASHIMOTO AKARA (JP)
Application Number:
PCT/JP2019/035479
Publication Date:
September 03, 2020
Filing Date:
September 10, 2019
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G01N1/00
Foreign References:
| JPH10274644A | 1998-10-13 | |||
| JP2017532472A | 2017-11-02 |
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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