Title:
METHODS FOR PREVENTING CORROSION OF PLASMA-EXPOSED YTTRIA COATED CONSTITUENTS
Document Type and Number:
WIPO Patent Application WO/2012/020355
Kind Code:
A3
Abstract:
In accordance with one embodiment of the present disclosure, a method for preventing corrosion of a plasma-exposed yttria-coated constituent from ambient acidic hydrolysis wherein the plasma-exposed yttria-coated constituent includes a hydrolysable acid precursor is disclosed. The method may include: removing the plasma-exposed yttria-coated constituent from a semiconductor processing assembly; binding the plasma-exposed yttria-coated constituent with flexible moisture wicking material; hydrolyzing the hydrolysable acid precursor with an overwhelming aqueous admixture to form a vitiated acidic compound, wherein the flexible moisture wicking material pulls the vitiated acidic compound away from the plasma-exposed yttria-coated constituent with capillary action; dehydrating the plasma-exposed yttria-coated constituent with additional flexible moisture wicking material to pull a latent amount of the vitiated acidic compound away from the plasma-exposed yttria-coated constituent; and isolating the plasma-exposed yttria-coated constituent from ambient moisture in a moisture obstructing enclosure.
Inventors:
SWAMI GANAPATHY (US)
LOEWENHARDT PETER (US)
YUNSANG KIM (US)
LOEWENHARDT PETER (US)
YUNSANG KIM (US)
Application Number:
PCT/IB2011/053459
Publication Date:
June 07, 2012
Filing Date:
August 03, 2011
Export Citation:
Assignee:
LAM RES CORP (US)
LAM RES AG (AT)
SWAMI GANAPATHY (US)
LOEWENHARDT PETER (US)
YUNSANG KIM (US)
LAM RES AG (AT)
SWAMI GANAPATHY (US)
LOEWENHARDT PETER (US)
YUNSANG KIM (US)
International Classes:
H01L21/205
Foreign References:
| US20090087615A1 | 2009-04-02 | |||
| US20070151581A1 | 2007-07-05 | |||
| US20050161061A1 | 2005-07-28 | |||
| US20080169588A1 | 2008-07-17 |
Attorney, Agent or Firm:
KONTRUS, Gerhard (Villach, AT)
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