Title:
METHODS OF WET PROCESSING ELECTRONIC COMPONENTS USING PROCESS LIQUIDS WITH CONTROLLED LEVELS OF GASES
Document Type and Number:
WIPO Patent Application WO1999043448
Kind Code:
A8
Abstract:
The present invention is related to wet processing methods for electronic components using process liquids having controlled levels (i.e., amounts) of gases. The present invention provides methods of wet processing where at least two process liquids used during a wet processing procedure contain different levels of gases. Sonic energy may optionally be used in one or more wet process steps of a wet processing procedure to enhance results. The methods of the present invention can result in, for example, improved cleaning or reduced particle contamination during a wet processing procedure.
Inventors:
BAY STEVEN T
DURR KEVIN R
MCCONNELL CHRISTOPHER F
VERHAVERBEKE STEVEN
DURR KEVIN R
MCCONNELL CHRISTOPHER F
VERHAVERBEKE STEVEN
Application Number:
PCT/US1999/003880
Publication Date:
February 08, 2001
Filing Date:
February 23, 1999
Export Citation:
Assignee:
CFMT INC (US)
International Classes:
B08B3/08; B08B3/04; B08B3/12; H01L21/304; H01L21/306; H01L21/308; (IPC1-7): B08B3/12; B08B3/10
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