Title:
METROLOGY SYSTEM, AND PRIMARY MIRROR RETAINING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/202823
Kind Code:
A1
Abstract:
The objective of the present invention is to obtain a metrology system and a primary mirror retaining device with which it is possible to measure an amount of displacement of an elevation axis of the primary mirror retaining device. A metrology system 30 measures an amount of displacement relating to a structure of a primary mirror retaining device comprising a primary mirror portion 2 including a primary mirror 6 and a primary mirror supporting portion 7 that supports the primary mirror 6, an elevation axis structural body 3 which supports the primary mirror portion 2 and which is capable of rotating about an elevation axis EL to change an angle of elevation of an orientation direction, which is the direction in which the primary mirror 6 faces, an azimuth angle stand 4 which is capable of rotating about an azimuth angle axis AZ to change an azimuth angle of the orientation direction, and which supports the elevation axis structural body 3 in such a way as to be capable of rotating about the elevation axis EL, and a pedestal portion 5 which supports the azimuth angle stand 4 in such a way as to be capable of rotating about the azimuth angle axis AZ, wherein the metrology system 30 is provided with: an elevation axis base portion 31 which passes through a position in which the elevation axis EL and the azimuth angle AZ intersect, is provided along the elevation axis EL, and is fixed to the azimuth angle stand 4; and an inclination gauge 32 which is arranged in a position in the elevation axis base portion 31 through which the azimuth angle axis AZ passes, and which measures an angle of inclination of the elevation axis base portion 31.
Inventors:
OWAKI YUTO (JP)
KATO ATSUSHI (JP)
KAWAGUCHI NOBORU (JP)
SOFUKU SATORU (JP)
KATO ATSUSHI (JP)
KAWAGUCHI NOBORU (JP)
SOFUKU SATORU (JP)
Application Number:
PCT/JP2022/013222
Publication Date:
September 29, 2022
Filing Date:
March 22, 2022
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B23/02
Foreign References:
| US4475110A | 1984-10-02 | |||
| JP2005070408A | 2005-03-17 | |||
| JP2007129463A | 2007-05-24 | |||
| JP2013243655A | 2013-12-05 |
Attorney, Agent or Firm:
MURAKAMI, Kanako et al. (JP)
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