Title:
MICRO DISPLACEMENT WORKTABLE WITH SIX DEGREES OF FREEDOM
Document Type and Number:
WIPO Patent Application WO/2009/003348
Kind Code:
A1
Abstract:
The micro displacement worktable with six degrees of freedom is comprised of a
micro displacement worktable stator (2), a micro displacement worktable mover (3)
and a micro displacement worktable base (1). The worktable has three sets of electromagnetic
driving units arranged on horizontal plane, which enable the worktable to move
in three degrees of freedom on horizontal plane with translational motions relative
to an X-axis and a Y-axis, and rotational motion about a Z-axis. The worktable
also has three sets of electromagnetic driving units arranged along vertical
plane, which enable the worktable to move in three degrees of freedom with translational
motions relative to a Z-axis, and rotational motions about an X-axis and a Y-axis.
Driving axes of two driving units in horizontal plane are parallel but not coincident,
and driving axis of the third driving unit is cross-sectional with the other two
units. Three sets of driving units arranged along vertical plane are arranged
in a triangular shape. The micro displacement worktable with six degrees of freedom
can compensate orientation error of a lithography wafer stage and realize the
function of lithography focus and level.
Inventors:
ZHU YU (CN)
WANG JINSONG (CN)
ZHANG MING (CN)
LI GUANG (CN)
XU DENGFENG (CN)
YIN WENSHENG (CN)
DUAN GUANGHONG (CN)
YANG KAIMING (CN)
WANG JINSONG (CN)
ZHANG MING (CN)
LI GUANG (CN)
XU DENGFENG (CN)
YIN WENSHENG (CN)
DUAN GUANGHONG (CN)
YANG KAIMING (CN)
Application Number:
PCT/CN2008/000503
Publication Date:
January 08, 2009
Filing Date:
March 14, 2008
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
ZHU YU (CN)
WANG JINSONG (CN)
ZHANG MING (CN)
LI GUANG (CN)
XU DENGFENG (CN)
YIN WENSHENG (CN)
DUAN GUANGHONG (CN)
YANG KAIMING (CN)
ZHU YU (CN)
WANG JINSONG (CN)
ZHANG MING (CN)
LI GUANG (CN)
XU DENGFENG (CN)
YIN WENSHENG (CN)
DUAN GUANGHONG (CN)
YANG KAIMING (CN)
International Classes:
B25H1/00; H02K41/00; G03F7/20
Foreign References:
| US20050168076A1 | 2005-08-04 | |||
| US20060061218A1 | 2006-03-23 | |||
| EP0342639A2 | 1989-11-23 | |||
| US6069416A | 2000-05-30 | |||
| CN1669744A | 2005-09-21 | |||
| CN101078889A | 2007-11-28 |
Attorney, Agent or Firm:
NTD PATENT & TRADEMARK AGENCY LIMITED BEIJING OFFICE (Block A Investment Plaza, 27 Jinrongdajie, Beijing 2, CN)
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