Title:
A MICRO-ELECTRO-MECHANICAL SWITCH AND A METHOD OF USING AND MAKING THEREOF
Document Type and Number:
WIPO Patent Application WO2002073673
Kind Code:
A9
Abstract:
A micro-electro-mechanical switch (10(1)) including at least one portion of a conductive line (16(1-2)) in the chamber (12), a beam (18) with an imbedded charge, and control electrodes (22(1-2)). The beam (18) has a conductive section (20) which is positioned in substantial alignment with the at least one portion of the conductive line (16(1-2)). The conductive section (20) of the beam (18) has an open position spaced away from the at least one portion of the conductive line (16(1-2)). Each of the control electrodes (22(1-2)) is spaced away from an opposing side of the beam (18) to control movement of the beam (18).
Inventors:
POTTER MICHAEL D
Application Number:
PCT/US2002/007518
Publication Date:
April 08, 2004
Filing Date:
March 12, 2002
Export Citation:
Assignee:
ROCHESTER INST TECH (US)
International Classes:
H01H59/00; (IPC1-7): H01L21/306; B44C1/22; C03C15/00
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