MICRO ELECTROMECHANICAL SYSTEMS FOR DELIVERING HIGH PURITY FLUIDS IN A CHEMICAL DELIVERY SYSTEM

Title:

MICRO ELECTROMECHANICAL SYSTEMS FOR DELIVERING HIGH PURITY FLUIDS IN A CHEMICAL DELIVERY SYSTEM

Document Type and Number:

WIPO Patent Application WO2004058425

Kind Code:

A8

Abstract:

Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve (1) sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.

Inventors:

ZNAMENSKY DMITRY
ZDUNEK ALAN D

Application Number:

PCT/IB2003/006199

Publication Date:

May 26, 2005

Filing Date:

December 19, 2003

Export Citation:

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Assignee:

AIR LIQUIDE (FR)

International Classes:

B01J4/02; B01J19/00; B01L3/02; (IPC1-7): F15C5/00

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