Title:
MICRO-FABRICATION METHOD
Document Type and Number:
WIPO Patent Application WO/2005/068163
Kind Code:
A1
Abstract:
A micro-fabrication method characterized by comprising the steps of applying a pulse laser beam to an unprocessed plastic material exhibiting a glass phase transition by heating and having a heat-shrinkage to form laser-processed patterns on the surface of or in the above unprocessed plastic material, and then heat-treating the unprocessed plastic material at temperatures not lower than a glass transition temperature Tg to fine the formed patterns by heat-shrinkage.
Inventors:
MISAWA HIROAKI (JP)
JUODKAZIS SAULIUS (JP)
JUODKAZIS SAULIUS (JP)
Application Number:
PCT/JP2005/000798
Publication Date:
July 28, 2005
Filing Date:
January 17, 2005
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
MISAWA HIROAKI (JP)
JUODKAZIS SAULIUS (JP)
MISAWA HIROAKI (JP)
JUODKAZIS SAULIUS (JP)
International Classes:
B29C59/16; B29C59/18; B29C71/02; B29C71/04; B44C1/22; (IPC1-7): B29C71/04; B29C71/02
Foreign References:
| JP2003136261A | 2003-05-14 | |||
| JPH07266695A | 1995-10-17 | |||
| US5338396A | 1994-08-16 |
Attorney, Agent or Firm:
Nishizawa, Toshio (11-1 Minami-Aoyama 6-chom, Minato-ku Tokyo, JP)
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