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Title:
MICRO-LENS ARRAY FOR METAL-CHANNEL PHOTOMULTIPLIER TUBE
Document Type and Number:
WIPO Patent Application WO/2024/030161
Kind Code:
A3
Abstract:
The effective quantum efficiency of a metal-channel photomultiplier tube can be increased with an optical system. The optical system can direct incident light from areas of low efficiency on the cathode of the metal-channel photomultiplier tube instead to areas of high efficiency on the cathode. These high-efficiency areas of the cathode can correspond to a position between the dynode structure.

Inventors:
DONDERS PAUL (US)
MACKAY DEREK (US)
Application Number:
PCT/US2023/016781
Publication Date:
May 16, 2024
Filing Date:
March 29, 2023
Export Citation:
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Assignee:
KLA CORP (US)
International Classes:
H01J43/18
Foreign References:
US20040100193A12004-05-27
US20080061690A12008-03-13
KR102166395B12020-10-15
JPH11345587A1999-12-14
JPH05290793A1993-11-05
Attorney, Agent or Firm:
MCANDREWS, Kevin et al. (US)
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