Title:
MICRO MIRROR
Document Type and Number:
WIPO Patent Application WO/2023/140463
Kind Code:
A1
Abstract:
A disclosed micro mirror allows stacked electrode body structures having different potential values and electrode body structures of a fixed electrode part and a moving electrode part to be different, so as to generate electrostatic force so that rotational force is provided in the same direction from comb electrodes arranged at both sides of a rotary shaft, and thus a stable mirror inclination is maintained, and an unnecessary electrostatic force can be offset, thereby increasing the precision of mirror rotation and increasing the geometric stability of a rotation operation.
Inventors:
KIM SEI MIN (KR)
KIM HWAN SUN (KR)
KOO HEE SUNG (KR)
KIM EUN BEE (KR)
KIM HWAN SUN (KR)
KOO HEE SUNG (KR)
KIM EUN BEE (KR)
Application Number:
PCT/KR2022/015559
Publication Date:
July 27, 2023
Filing Date:
October 14, 2022
Export Citation:
Assignee:
MEMS CORP (KR)
International Classes:
G02B26/08
Foreign References:
| KR102343643B1 | 2021-12-27 | |||
| KR100682961B1 | 2007-02-15 | |||
| KR20080003996A | 2008-01-09 | |||
| KR20060018683A | 2006-03-02 | |||
| KR20050053053A | 2005-06-08 |
Attorney, Agent or Firm:
MYUNGJANG IP LAW FIRM (KR)
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