Title:
MICROACOUSTIC FILTER WITH A LAYER ARRANGEMENT CONTAINING A CAVITY
Document Type and Number:
WIPO Patent Application WO/2024/054152
Kind Code:
A9
Abstract:
An apparatus is disclosed for implementing a microacoustic filter with a cavity stack. In an example aspect, the apparatus includes a microacoustic filter with an electrode structure (310), a cavity stack (126), a buffer layer, (128) and a piezoelectric layer (130). The cavity stack comprises a conductive layer (312), a substrate layer (316), and at least two pillars (314) extending past a plane defined by a surface of the substrate layer and towards the conductive layer to form a cavity (318) between the substrate layer and the conductive layer. The buffer layer (128) is disposed between the conductive layer (312) of the cavity stack and the electrode (310) structure. The piezoelectric layer (130) is disposed between the buffer layer (128) and the electrode structure (310).
Inventors:
AIGNER WILLI (SG)
BLASCHKE BENNO (SG)
CERANSKI CHRISTIAN (SG)
BLASCHKE BENNO (SG)
CERANSKI CHRISTIAN (SG)
Application Number:
PCT/SG2023/050559
Publication Date:
April 11, 2024
Filing Date:
August 15, 2023
Export Citation:
Assignee:
RF360 SINGAPORE PTE LTD (SG)
International Classes:
H03H9/02; H03H9/05; H03H9/17
Attorney, Agent or Firm:
DREW & NAPIER LLC (SG)
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