Title:
MICROELECTROMECHANICAL DEVICE WITH MOVING ELEMENT
Document Type and Number:
WIPO Patent Application WO2001006543
Kind Code:
A3
Abstract:
A microelectromechanical (MEMS) device (100) has a substrate (102) and a generally planar moving element (106), such as a mirror, disposed in parallel to the surface (108) of the substrate. An actuator is operatively engageable with the moving element (106) for selectively actuating the moving element (106) between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device (100) may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.
Inventors:
CHERTKOW ROBERTO IGAL (IL)
Application Number:
PCT/IL2000/000431
Publication Date:
May 25, 2001
Filing Date:
July 20, 2000
Export Citation:
Assignee:
MEMLINK LTD (IL)
CHERTKOW ROBERTO IGAL (IL)
CHERTKOW ROBERTO IGAL (IL)
International Classes:
B81B3/00; G02B26/02; B81B7/02; B81C1/00; B81C3/00; G02B6/26; G02B6/35; G02B26/08; H04Q11/00; B81C99/00; G02B6/42; (IPC1-7): G02B26/02
Foreign References:
| US5914801A | 1999-06-22 | |||
| US6134042A | 2000-10-17 |
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