Title:
MICROFILTER AND ACOUSTIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/258364
Kind Code:
A1
Abstract:
Disclosed are a microfilter and an acoustic device, comprising a substrate that is provided with a back cavity, and a metal film disposed on the substrate and suspended on the back cavity; the outer surface of the metal film is coated with a non-stick layer; the degree of stickiness between the non-stick layer and particles is lower than the degree of stickiness between the metal film and the particles; the metal film and the non-stick layer are provided with distributed through holes. According to an embodiment of the present invention, by means of providing a non-stick layer on the metal film, the problem in which particles used for a long time stick to the metal film provided with through holes may be avoided, thus ensuring the sensitivity of a sensor.
More Like This:
| WO/2004/023914 | COMMUNICATION APPARATUS AND HELMET |
| WO/2003/030772 | A MICROPHONE MODULE FOR USE WITH A HEARING AID OR COCHLEAR IMPLANT SYSTEM |
Inventors:
LIN YUJING (CN)
Application Number:
PCT/CN2019/094777
Publication Date:
December 30, 2020
Filing Date:
July 05, 2019
Export Citation:
Assignee:
WEIFANG GOERTEK MICROELECTRONICS CO LTD (CN)
International Classes:
H04R1/08; B01D46/54
Foreign References:
| US20050254673A1 | 2005-11-17 | |||
| CN109379684A | 2019-02-22 | |||
| US20060018487A1 | 2006-01-26 |
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