Title:
MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2020/179036
Kind Code:
A1
Abstract:
A microscope according to the present invention comprises: an illumination optical system that irradiates a sample, on a sample surface, with light to form illumination stripes constituted by stripe-shape illumination; a scanning unit that relatively scans the striped illumination and the sample in an in-plane direction of the sample surface; a phase modulator element that sets the illumination stripes to a plurality of phase states; a detection optical system into which enters light from the sample illuminated by the illumination stripes; detectors that are disposed at a plurality of positions coupled with the sample surface with respect to the detection optical system, and detect light from the sample on the sample surface; and an image processor unit that generates an output image by using detection results detected by the plurality of detectors at a plurality of relative positions in the in-plane direction of the sample surface when the illumination stripes are in each of the plurality of phase states.
Inventors:
FUJIKAKE YOSUKE (JP)
NAKAYAMA SHIGERU (JP)
NAKAYAMA SHIGERU (JP)
Application Number:
PCT/JP2019/008966
Publication Date:
September 10, 2020
Filing Date:
March 06, 2019
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B21/14; G02B21/36
Domestic Patent References:
| WO2017094184A1 | 2017-06-08 | |||
| WO2015052936A1 | 2015-04-16 | |||
| WO2016151665A1 | 2016-09-29 | |||
| WO2009031418A1 | 2009-03-12 | |||
| WO2015118634A1 | 2015-08-13 | |||
| WO2010088418A1 | 2010-08-05 |
Foreign References:
| JP2016105126A | 2016-06-09 | |||
| JP2010271522A | 2010-12-02 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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