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Title:
MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2022/102584
Kind Code:
A1
Abstract:
This microscope comprises: an illumination optical system that collects illumination light and forms an illumination area on a sample; a detection optical system that forms, on an image surface, an image generated by light from the sample on which the illumination area is formed; an aberration setting unit that sets an aberration state of the detection optical system and/or the illumination optical system; a detector having a detection surface disposed on the image surface of the detection optical system, a plurality of detection units being arranged on the detection surface; a calculation unit that calculates light amount distribution information of a detection image detected by the plurality of detection units; and a computing unit that, on the basis of the light amount distribution information of the detection image in a plurality of aberration states set by the aberration setting unit, determines the aberration state of the detection optical system and/or the illumination optical system to be set by the aberration setting unit.

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Inventors:
FUJIKAKE YOSUKE (JP)
NIITANI YAMATO (JP)
Application Number:
PCT/JP2021/041029
Publication Date:
May 19, 2022
Filing Date:
November 08, 2021
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
G02B21/36
Domestic Patent References:
WO2009153919A12009-12-23
Foreign References:
JP2016532883A2016-10-20
JP2019070820A2019-05-09
JP2015531072A2015-10-29
JP2018205069A2018-12-27
JP2011180290A2011-09-15
JP2018173507A2018-11-08
JP2020190386A2020-11-26
US9632296B22017-04-25
JP4933706B22012-05-16
Other References:
C. J. SHEPPARDS. B. MEHTAR. HEINTZMANN: "Superresolution by image scanning microscopic using pixel reassignment", OPTICS LETTER (USA, vol. 38, no. 15, 2013, pages 2889, XP001583776, DOI: http://dx.doi.org/10.1364/OL.38.002889
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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