Title:
MICROSCOPIC IMAGE CAPTURING METHOD AND MICROSCOPIC IMAGE CAPTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/181482
Kind Code:
A1
Abstract:
This microscopic image capturing method includes: a step for emitting a light beam from a light beam light source 215; a step for detecting a spot image by a camera 204 or a photodiode 210; a step for focusing the spot image by an objective lens actuator moving an objective lens 202 in the optical axis direction of the light beam with respect to a sample container 100; a step for determining by a reflective surface identification unit 208 whether the light beam has been applied to a defect on the basis of the spot image; a step a) for, when it is determined that the light beam has been applied to the defect, moving by an XY stage 300 the sample container 100 with respect to the objective lens 202 in a direction orthogonal to the optical axis of the light beam in accordance with a prescribed condition; and a step b) for, when it is determined that the light beam has not been applied to the defect, capturing a microscopic image of a sample by using an illuminator 209.
Inventors:
MASUYA AKIRA (JP)
YABUHARA TADAO (JP)
YABUHARA TADAO (JP)
Application Number:
PCT/JP2020/010101
Publication Date:
September 16, 2021
Filing Date:
March 09, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G02B21/00; G02B21/26; G02B21/36
Foreign References:
| JP2018054968A | 2018-04-05 | |||
| JP2008216248A | 2008-09-18 | |||
| JP2000294608A | 2000-10-20 | |||
| JP2001305420A | 2001-10-31 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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