Title:
MICROWAVE PLASMA NOZZLE FOR DEPOSITION OF POWDER AEROSOL FOR COATING AND COATING APPARATUS USING POWDER AEROSOL FOR COATING USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/025655
Kind Code:
A1
Abstract:
A nozzle for deposition of powder aerosol for coating is disclosed. The nozzle for deposition of powder aerosol for coating comprises: an entrance part through which carrier gas and the powder aerosol for coating are injected, and a discharge part through which the powder aerosol for coating is discharged, wherein the discharge part comprises: a discharge pipe that is connected so that the powder aerosol for coating is discharged into a vacuum chamber in which a substrate to be deposited is accommodated; and a plasma generation means for generating plasma between the entrance part and the discharge part.
Inventors:
JANG SOO OUK (KR)
PARK HYUN JAE (KR)
CHANG HYON U (KR)
CHO CHANG HYUN (KR)
KIM JI HUN (KR)
LEE KI YONG (KR)
KANG IN JE (KR)
PARK HYUN JAE (KR)
CHANG HYON U (KR)
CHO CHANG HYUN (KR)
KIM JI HUN (KR)
LEE KI YONG (KR)
KANG IN JE (KR)
Application Number:
PCT/KR2021/009853
Publication Date:
February 03, 2022
Filing Date:
July 29, 2021
Export Citation:
Assignee:
KOREA INST OF FUSION ENERGY (KR)
International Classes:
C23C24/04; H01J37/32
Foreign References:
| JP2019210548A | 2019-12-12 | |||
| KR20080050356A | 2008-06-05 | |||
| JP2006193784A | 2006-07-27 | |||
| JP2007146281A | 2007-06-14 | |||
| KR20200007949A | 2020-01-22 |
Attorney, Agent or Firm:
NAM, Gun Pil et al. (KR)
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